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Static characterization of bulk micromachined accelerometer structure using a nanoindenter
Static characterization of bulk micromachined accelerometer structure using a nanoindenter
Static characterization of bulk micromachined accelerometer structure using a nanoindenter
Mukhiya, R. (author) / Kumar, A. (author) / Kamat, S. V. (author) / Bhattacharyya, T. K. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 15 ; 353-358
2012-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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