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Static characterization of bulk micromachined accelerometer structure using a nanoindenter
Static characterization of bulk micromachined accelerometer structure using a nanoindenter
Static characterization of bulk micromachined accelerometer structure using a nanoindenter
Mukhiya, R. (Autor:in) / Kumar, A. (Autor:in) / Kamat, S. V. (Autor:in) / Bhattacharyya, T. K. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 15 ; 353-358
01.01.2012
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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