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Preparation of n^+ emitter on p-type silicon wafer using the spin-on doping method

Tang, Y. / Wang, G. / Hu, Z. / Qin, X. / Du, G. / Shi, W.

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Preparation of n^+ emitter on p-type silicon wafer using the spin-on doping method

Tang, Y. / Wang, G. / Hu, Z. / Qin, X. / Du, G. / Shi, W.

Preparation of n^+ emitter on p-type silicon wafer using the spin-on doping method

Tang, Y. / Wang, G. / Hu, Z. / Qin, X. / Du, G. / Shi, W.

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Check availability in my library

Order at Subito €

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Document information

Title:

Preparation of n^+ emitter on p-type silicon wafer using the spin-on doping method

Contributors:

Tang, Y. (author) / Wang, G. (author) / Hu, Z. (author) / Qin, X. (author) / Du, G. (author) / Shi, W. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 15 ; 359-363

Publication date:

2012-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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