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Wafer-scale fabrication of silicon nanowire arrays with controllable dimensions

Wang, W. / Li, D. / Tian, M. / Lee, Y. C. / Yang, R.

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Wafer-scale fabrication of silicon nanowire arrays with controllable dimensions

Wang, W. / Li, D. / Tian, M. / Lee, Y. C. / Yang, R.

Wafer-scale fabrication of silicon nanowire arrays with controllable dimensions

Wang, W. / Li, D. / Tian, M. / Lee, Y. C. / Yang, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Wafer-scale fabrication of silicon nanowire arrays with controllable dimensions

Contributors:

Wang, W. (author) / Li, D. (author) / Tian, M. (author) / Lee, Y. C. (author) / Yang, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 8649-8655

Publication date:

2012-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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