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Nano-Motion X-Y Stage by Pneumatic Servo Spherical Bearing Actuators

Sugimoto, A. / Hirayama, T. / Matsuoka, T. / Sasaki, K.

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Nano-Motion X-Y Stage by Pneumatic Servo Spherical Bearing Actuators

Sugimoto, A. / Hirayama, T. / Matsuoka, T. / Sasaki, K.

Nano-Motion X-Y Stage by Pneumatic Servo Spherical Bearing Actuators

Sugimoto, A. / Hirayama, T. / Matsuoka, T. / Sasaki, K.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nano-Motion X-Y Stage by Pneumatic Servo Spherical Bearing Actuators

Contributors:

Sugimoto, A. (author) / Hirayama, T. (author) / Matsuoka, T. (author) / Sasaki, K. (author)

Published in:

KEY ENGINEERING MATERIALS ; 516 ; 281-286

Publication date:

2012-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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