Comparative study on dry etching of α- and β-SiC nano-pillars: Fid-Bau Portal

Comparative study on dry etching of α- and β-SiC nano-pillars

Choi, J. H. / Latu-Romain, L. / Bano, E. / Henry, A. / Lee, W. J. / Chevolleau, T. / Baron, T.

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Comparative study on dry etching of α- and β-SiC nano-pillars

Choi, J. H. / Latu-Romain, L. / Bano, E. / Henry, A. / Lee, W. J. / Chevolleau, T. / Baron, T.

Comparative study on dry etching of α- and β-SiC nano-pillars

Choi, J. H. / Latu-Romain, L. / Bano, E. / Henry, A. / Lee, W. J. / Chevolleau, T. / Baron, T.

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Document information

Title:

Comparative study on dry etching of α- and β-SiC nano-pillars

Contributors:

Choi, J. H. (author) / Latu-Romain, L. (author) / Bano, E. (author) / Henry, A. (author) / Lee, W. J. (author) / Chevolleau, T. (author) / Baron, T. (author)

Published in:

MATERIALS LETTERS ; 87 ; 9-12

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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