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Optical properties of SiOC film by PL spectrometer and reflectance
Optical properties of SiOC film by PL spectrometer and reflectance
Optical properties of SiOC film by PL spectrometer and reflectance
Oh, T. (author) / Boo, J.-H. / Ahn, H.
2012-01-01
3 pages
Article (Journal)
English
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