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    Ultra-Precision Cutting of Single Crystal Silicon Using Diamond Tool with Large Top Corner Radius

    New search for: Kobaru, Y.
    New search for: Kondo, E.
    New search for: Iwamoto, R.

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    Ultra-Precision Cutting of Single Crystal Silicon Using Diamond Tool with Large Top Corner Radius

    New search for: Kobaru, Y.
    New search for: Kondo, E.
    New search for: Iwamoto, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ultra-Precision Cutting of Single Crystal Silicon Using Diamond Tool with Large Top Corner Radius

    New search for: Kobaru, Y.
    New search for: Kondo, E.
    New search for: Iwamoto, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Ultra-Precision Cutting of Single Crystal Silicon Using Diamond Tool with Large Top Corner Radius

    Contributors:

    Kobaru, Y. (author) / Kondo, E. (author) / Iwamoto, R. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 523/524 ; 81-86

    Publication date:

    2012-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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