A Prototype MEMS Actuator Driven by Magnetic Fluid Enclosed with Polyimide Diaphragms: Fid-Bau Portal

A Prototype MEMS Actuator Driven by Magnetic Fluid Enclosed with Polyimide Diaphragms

Okubo, Y. / Ota, H. / Syoji, K. / Imai, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

A Prototype MEMS Actuator Driven by Magnetic Fluid Enclosed with Polyimide Diaphragms

Okubo, Y. / Ota, H. / Syoji, K. / Imai, S.

A Prototype MEMS Actuator Driven by Magnetic Fluid Enclosed with Polyimide Diaphragms

Okubo, Y. / Ota, H. / Syoji, K. / Imai, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

A Prototype MEMS Actuator Driven by Magnetic Fluid Enclosed with Polyimide Diaphragms

Contributors:

Okubo, Y. (author) / Ota, H. (author) / Syoji, K. (author) / Imai, S. (author)

Published in:

KEY ENGINEERING MATERIALS ; 523/524 ; 557-562

Publication date:

2012-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Similar titles

Prototype MEMS

British Library Online Contents | 2002

Flexible Diaphragms

Saliklis, Edmond | Springer Verlag | 2020

Rigid Diaphragms

Saliklis, Edmond | Springer Verlag | 2020

Loud-speaker diaphragms

McLachlan, N.W. | Engineering Index Backfile | 1927

Building pipe with diaphragms

MA XINPAN / GAO QI / WANG XUECHUN | European Patent Office | 2015

Free access