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    A Design Method for Thin Film Patterning Process via Lift-Off Technique

    New search for: Morinaga, E.
    New search for: Matsuura, Y.
    New search for: Wakamatsu, H.
    New search for: Satoh, R.
    New search for: Nakagawa, K.
    New search for: Iwata, Y.
    New search for: Arai, E.

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    A Design Method for Thin Film Patterning Process via Lift-Off Technique

    New search for: Morinaga, E.
    New search for: Matsuura, Y.
    New search for: Wakamatsu, H.
    New search for: Satoh, R.
    New search for: Nakagawa, K.
    New search for: Iwata, Y.
    New search for: Arai, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A Design Method for Thin Film Patterning Process via Lift-Off Technique

    New search for: Morinaga, E.
    New search for: Matsuura, Y.
    New search for: Wakamatsu, H.
    New search for: Satoh, R.
    New search for: Nakagawa, K.
    New search for: Iwata, Y.
    New search for: Arai, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    A Design Method for Thin Film Patterning Process via Lift-Off Technique

    Contributors:

    Morinaga, E. (author) / Matsuura, Y. (author) / Wakamatsu, H. (author) / Satoh, R. (author) / Nakagawa, K. (author) / Iwata, Y. (author) / Arai, E. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 523/524 ; 787-792

    Publication date:

    2012-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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