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Anti-adhesion treatment for nanoimprint stamps using atmospheric pressure plasma CVD (APPCVD)

Wu, C. L. / Yang, C. Y. / An, T. P. / Lin, J. W. / Sung, C. K.

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Anti-adhesion treatment for nanoimprint stamps using atmospheric pressure plasma CVD (APPCVD)

Wu, C. L. / Yang, C. Y. / An, T. P. / Lin, J. W. / Sung, C. K.

Anti-adhesion treatment for nanoimprint stamps using atmospheric pressure plasma CVD (APPCVD)

Wu, C. L. / Yang, C. Y. / An, T. P. / Lin, J. W. / Sung, C. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Anti-adhesion treatment for nanoimprint stamps using atmospheric pressure plasma CVD (APPCVD)

Contributors:

Wu, C. L. (author) / Yang, C. Y. (author) / An, T. P. (author) / Lin, J. W. (author) / Sung, C. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 261 ; 441-446

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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