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Characterization and kinetic investigation of electroless deposition of pure cobalt thin films on silicon substrates

Cheng, S. L. / Hsu, T. L. / Lee, T. / Lee, S. W. / Hu, J. C. / Chen, L. T.

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Characterization and kinetic investigation of electroless deposition of pure cobalt thin films on silicon substrates

Cheng, S. L. / Hsu, T. L. / Lee, T. / Lee, S. W. / Hu, J. C. / Chen, L. T.

Characterization and kinetic investigation of electroless deposition of pure cobalt thin films on silicon substrates

Cheng, S. L. / Hsu, T. L. / Lee, T. / Lee, S. W. / Hu, J. C. / Chen, L. T.

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Document information

Title:

Characterization and kinetic investigation of electroless deposition of pure cobalt thin films on silicon substrates

Contributors:

Cheng, S. L. (author) / Hsu, T. L. (author) / Lee, T. (author) / Lee, S. W. (author) / Hu, J. C. (author) / Chen, L. T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 264 ; 732-736

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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