Thermodynamics of the formation of face-centered-cubic silicon nanocrystals in silicon-rich SiC thin films annealed using rapid thermal annealing: Fid-Bau Portal

Thermodynamics of the formation of face-centered-cubic silicon nanocrystals in silicon-rich SiC thin films annealed using rapid thermal annealing

Zeng, Y. / Chen, X. / Cheng, Q. / Zhao, J. / Song, W. / Dai, N.

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Thermodynamics of the formation of face-centered-cubic silicon nanocrystals in silicon-rich SiC thin films annealed using rapid thermal annealing

Zeng, Y. / Chen, X. / Cheng, Q. / Zhao, J. / Song, W. / Dai, N.

Thermodynamics of the formation of face-centered-cubic silicon nanocrystals in silicon-rich SiC thin films annealed using rapid thermal annealing

Zeng, Y. / Chen, X. / Cheng, Q. / Zhao, J. / Song, W. / Dai, N.

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Check availability in my library

Order at Subito €

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Document information

Title:

Thermodynamics of the formation of face-centered-cubic silicon nanocrystals in silicon-rich SiC thin films annealed using rapid thermal annealing

Contributors:

Zeng, Y. (author) / Chen, X. (author) / Cheng, Q. (author) / Zhao, J. (author) / Song, W. (author) / Dai, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 265 ; 286-290

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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