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Effects of power on properties of ZnO thin films grown by radio frequency magnetron sputtering

Zhao, Y. J. / Jiang, D. Y. / Zhao, M. / Deng, R. / Qin, J. M. / Gao, S. / Liang, Q. C. / Zhao, J. X.

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Effects of power on properties of ZnO thin films grown by radio frequency magnetron sputtering

Zhao, Y. J. / Jiang, D. Y. / Zhao, M. / Deng, R. / Qin, J. M. / Gao, S. / Liang, Q. C. / Zhao, J. X.

Effects of power on properties of ZnO thin films grown by radio frequency magnetron sputtering

Zhao, Y. J. / Jiang, D. Y. / Zhao, M. / Deng, R. / Qin, J. M. / Gao, S. / Liang, Q. C. / Zhao, J. X.

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Check availability in my library

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Document information

Title:

Effects of power on properties of ZnO thin films grown by radio frequency magnetron sputtering

Contributors:

Zhao, Y. J. (author) / Jiang, D. Y. (author) / Zhao, M. (author) / Deng, R. (author) / Qin, J. M. (author) / Gao, S. (author) / Liang, Q. C. (author) / Zhao, J. X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 266 ; 440-444

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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