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    Effect of Damage Removal Treatment after Trench Etching on the Reliability of Trench MOSFET

    New search for: Miyahara, S.
    New search for: Watanabe, H.
    New search for: Yamamoto, T.
    New search for: Tsuruta, K.
    New search for: Onda, S.
    New search for: Soejima, N.
    New search for: Watanabe, Y.
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    New search for: Lebedev, A.A.
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    New search for: Levinshtein, M.E.

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    Effect of Damage Removal Treatment after Trench Etching on the Reliability of Trench MOSFET

    New search for: Miyahara, S.
    New search for: Watanabe, H.
    New search for: Yamamoto, T.
    New search for: Tsuruta, K.
    New search for: Onda, S.
    New search for: Soejima, N.
    New search for: Watanabe, Y.
    New search for: Morimoto, J.
    New search for: Lebedev, A.A.
    New search for: Davydov, S.Y.
    New search for: Ivanov, P.A.
    New search for: Levinshtein, M.E.

    Access

    Access via TIB
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    Order at Subito €

    Effect of Damage Removal Treatment after Trench Etching on the Reliability of Trench MOSFET

    New search for: Miyahara, S.
    New search for: Watanabe, H.
    New search for: Yamamoto, T.
    New search for: Tsuruta, K.
    New search for: Onda, S.
    New search for: Soejima, N.
    New search for: Watanabe, Y.
    New search for: Morimoto, J.
    New search for: Lebedev, A.A.
    New search for: Davydov, S.Y.
    New search for: Ivanov, P.A.
    New search for: Levinshtein, M.E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Effect of Damage Removal Treatment after Trench Etching on the Reliability of Trench MOSFET

    Contributors:

    Miyahara, S. (author) / Watanabe, H. (author) / Yamamoto, T. (author) / Tsuruta, K. (author) / Onda, S. (author) / Soejima, N. (author) / Watanabe, Y. (author) / Morimoto, J. (author) / Lebedev, A.A. / Davydov, S.Y.

    Published in:

    Silicon Carbide and Related Materials 2012 Selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6, 2012, St. Petersburg, Russian Federation ; 789-792

    MATERIALS SCIENCE FORUM ; 740/742

    Publication date:

    2013-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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