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Low temperature wet etching to reveal sub-surface damage in sapphire substrates

Kumar, P. / Lee, J. / Lee, G. / Rao, S. / Singh, D. / Singh, R. K.

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Low temperature wet etching to reveal sub-surface damage in sapphire substrates

Kumar, P. / Lee, J. / Lee, G. / Rao, S. / Singh, D. / Singh, R. K.

Low temperature wet etching to reveal sub-surface damage in sapphire substrates

Kumar, P. / Lee, J. / Lee, G. / Rao, S. / Singh, D. / Singh, R. K.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Low temperature wet etching to reveal sub-surface damage in sapphire substrates

Contributors:

Kumar, P. (author) / Lee, J. (author) / Lee, G. (author) / Rao, S. (author) / Singh, D. (author) / Singh, R. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 273 ; 58-61

Publication date:

2013-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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