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    Composition, structure and electrical properties of DC reactive magnetron sputtered Al"2O"3 thin films

    New search for: Prasanna, S.
    New search for: Krishnendu, G.
    New search for: Shalini, S.
    New search for: Biji, P.
    New search for: Mohan Rao, G.
    New search for: Jayakumar, S.
    New search for: Balasundaraprabhu, R.

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    Composition, structure and electrical properties of DC reactive magnetron sputtered Al"2O"3 thin films

    New search for: Prasanna, S.
    New search for: Krishnendu, G.
    New search for: Shalini, S.
    New search for: Biji, P.
    New search for: Mohan Rao, G.
    New search for: Jayakumar, S.
    New search for: Balasundaraprabhu, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Composition, structure and electrical properties of DC reactive magnetron sputtered Al"2O"3 thin films

    New search for: Prasanna, S.
    New search for: Krishnendu, G.
    New search for: Shalini, S.
    New search for: Biji, P.
    New search for: Mohan Rao, G.
    New search for: Jayakumar, S.
    New search for: Balasundaraprabhu, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
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    Document information
    Title:

    Composition, structure and electrical properties of DC reactive magnetron sputtered Al"2O"3 thin films

    Contributors:

    Prasanna, S. (author) / Krishnendu, G. (author) / Shalini, S. (author) / Biji, P. (author) / Mohan Rao, G. (author) / Jayakumar, S. (author) / Balasundaraprabhu, R. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 16 ; 705-711

    Publication date:

    2013-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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