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Effect of post-deposition annealing on composition and electrical properties of dc reactive magnetron sputtered Al2O3 thin films
Effect of post-deposition annealing on composition and electrical properties of dc reactive magnetron sputtered Al2O3 thin films
Effect of post-deposition annealing on composition and electrical properties of dc reactive magnetron sputtered Al2O3 thin films
Prasanna, S. (author) / Shaik, H. (author) / Rao, G.M. (author) / Vandana (author) / Singh, P.K. (author) / Jayakumar, S. (author) / Balasundaraprabhu, R. (author)
MATERIALS TECHNOLOGY ; 29 ; 83-89
2014-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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