Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Exploring the benefits of depositing hard TiN thin films by non-reactive magnetron sputtering

    New search for: Martinez-Martinez, D.
    New search for: Lopez-Cartes, C.
    New search for: Fernandez, A.
    New search for: Sanchez-Lopez, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Exploring the benefits of depositing hard TiN thin films by non-reactive magnetron sputtering

    New search for: Martinez-Martinez, D.
    New search for: Lopez-Cartes, C.
    New search for: Fernandez, A.
    New search for: Sanchez-Lopez, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Exploring the benefits of depositing hard TiN thin films by non-reactive magnetron sputtering

    New search for: Martinez-Martinez, D.
    New search for: Lopez-Cartes, C.
    New search for: Fernandez, A.
    New search for: Sanchez-Lopez, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Exploring the benefits of depositing hard TiN thin films by non-reactive magnetron sputtering

    Contributors:

    Martinez-Martinez, D. (author) / Lopez-Cartes, C. (author) / Fernandez, A. (author) / Sanchez-Lopez, J. C. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 275 ; 121-126

    Publication date:

    2013-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Reactive DC Magnetron Sputtering of Vanadium Oxide Thin Films

    Batista, C. / Mendes, J. / Teixeira, V. et al. | British Library Online Contents | 2008

    AlNxOy thin films deposited by DC reactive magnetron sputtering

    Borges, J. / Vaz, F. / Marques, L. | British Library Online Contents | 2010

    Properties of zirconia thin films prepared by reactive magnetron sputtering

    Hembram, K. P. / Mohan Rao, G. | British Library Online Contents | 2007

    Nanostructured CrN thin films prepared by reactive pulsed DC magnetron sputtering

    Elangovan, T. / Kuppusami, P. / Thirumurugesan, R. et al. | British Library Online Contents | 2010

    Pulsed DC reactive magnetron sputtering of vanadium dioxide thermochromic thin films

    Batista, C. / Teixeira, V. / Ribeiro, R.M. | British Library Online Contents | 2011

    Back to top