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Laser-induced front side etching of fused silica with femtosecond laser radiation using thin metal layers
Laser-induced front side etching of fused silica with femtosecond laser radiation using thin metal layers
Laser-induced front side etching of fused silica with femtosecond laser radiation using thin metal layers
Lorenz, P. (author) / Ehrhardt, M. (author) / Zimmer, K. (author)
APPLIED SURFACE SCIENCE ; 278 ; 255-258
2013-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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