Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers

Lorenz, P. / Ehrhardt, M. / Wehrmann, A. et al. | British Library Online Contents | 2012

Laser-induced front side and back side etching of fused silica with KrF and XeF excimer lasers using metallic absorber layers: A comparison

Lorenz, P. / Ehrhardt, M. / Zimmer, K. | British Library Online Contents | 2012

Etching and forward transfer of fused silica in solid-phase by femtosecond laser-induced solid etching (LISE)

Banks, D. P. / Kaur, K. S. / Eason, R. W. | British Library Online Contents | 2009

Backside etching of fused silica with Nd:YAG laser

Zimmer, K. / Bohme, R. / Pissadakis, S. et al. | British Library Online Contents | 2006

Reducing the incubation effects for rear side laser etching of fused silica

Zimmer, K. / Ehrhardt, M. / Lorenz, P. et al. | British Library Online Contents | 2014