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    Ultra-short pulsed laser ablation of silicon nitride layers: Investigation near threshold fluence

    New search for: Heinrich, G.
    New search for: Wollgarten, M.
    New search for: Bahr, M.
    New search for: Lawerenz, A.

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    Ultra-short pulsed laser ablation of silicon nitride layers: Investigation near threshold fluence

    New search for: Heinrich, G.
    New search for: Wollgarten, M.
    New search for: Bahr, M.
    New search for: Lawerenz, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ultra-short pulsed laser ablation of silicon nitride layers: Investigation near threshold fluence

    New search for: Heinrich, G.
    New search for: Wollgarten, M.
    New search for: Bahr, M.
    New search for: Lawerenz, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Ultra-short pulsed laser ablation of silicon nitride layers: Investigation near threshold fluence

    Contributors:

    Heinrich, G. (author) / Wollgarten, M. (author) / Bahr, M. (author) / Lawerenz, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 278 ; 265-267

    Publication date:

    2013-01-01

    Size:

    3 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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