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Modelling of Polishing Tools for High Spatial Frequency Defect Correction on Aspherical Surfaces
Modelling of Polishing Tools for High Spatial Frequency Defect Correction on Aspherical Surfaces
Modelling of Polishing Tools for High Spatial Frequency Defect Correction on Aspherical Surfaces
Goupil, A. (author) / Iordanoff, I. (author) / Charles, J.L. (author) / Rinchet, A. (author)
KEY ENGINEERING MATERIALS ; 554/557 ; 1232-1244
2013-01-01
13 pages
Article (Journal)
English
DDC:
620.11
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