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    Oxidation of Tantalum Nitride

    New search for: Hamaguchi, K.
    New search for: Tsuchiyama, T.
    New search for: Matsushita, J.
    New search for: Kai, T.
    New search for: Mizuta, K.
    New search for: Nakazato, T.
    New search for: Matsunaga, N.
    New search for: Hirata, Y.
    New search for: Sameshima, S.
    New search for: Tsutsui, T.
    New search for: Yoshida, M.
    New search for: Kim, H.
    New search for: Yang, J.-F.
    New search for: Sekino, T.

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    Oxidation of Tantalum Nitride

    New search for: Hamaguchi, K.
    New search for: Tsuchiyama, T.
    New search for: Matsushita, J.
    New search for: Kai, T.
    New search for: Mizuta, K.
    New search for: Nakazato, T.
    New search for: Matsunaga, N.
    New search for: Hirata, Y.
    New search for: Sameshima, S.
    New search for: Tsutsui, T.
    New search for: Yoshida, M.
    New search for: Kim, H.
    New search for: Yang, J.-F.
    New search for: Sekino, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Oxidation of Tantalum Nitride

    New search for: Hamaguchi, K.
    New search for: Tsuchiyama, T.
    New search for: Matsushita, J.
    New search for: Kai, T.
    New search for: Mizuta, K.
    New search for: Nakazato, T.
    New search for: Matsunaga, N.
    New search for: Hirata, Y.
    New search for: Sameshima, S.
    New search for: Tsutsui, T.
    New search for: Yoshida, M.
    New search for: Kim, H.
    New search for: Yang, J.-F.
    New search for: Sekino, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Oxidation of Tantalum Nitride

    Contributors:

    Hamaguchi, K. (author) / Tsuchiyama, T. (author) / Matsushita, J. (author) / Kai, T. / Mizuta, K. / Nakazato, T. / Matsunaga, N. / Hirata, Y. / Sameshima, S. / Tsutsui, T.

    Published in:

    Eco-Materials Processing and Design XIV ; 125-130

    MATERIALS SCIENCE FORUM ; 761

    Publication date:

    2013-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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