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    Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters

    New search for: Li, Z.
    New search for: Gu, L.
    New search for: Tang, G.
    New search for: Ma, X.
    New search for: Sun, M.
    New search for: Wang, L.

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    Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters

    New search for: Li, Z.
    New search for: Gu, L.
    New search for: Tang, G.
    New search for: Ma, X.
    New search for: Sun, M.
    New search for: Wang, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters

    New search for: Li, Z.
    New search for: Gu, L.
    New search for: Tang, G.
    New search for: Ma, X.
    New search for: Sun, M.
    New search for: Wang, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters

    Contributors:

    Li, Z. (author) / Gu, L. (author) / Tang, G. (author) / Ma, X. (author) / Sun, M. (author) / Wang, L. (author)

    Published in:

    RARE METALS -BEIJING- ENGLISH EDITION ; 30 ; 142-145

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    1001-0521

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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