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Microstructure and nanomechanical properties of Fe^+ implanted silicon
Microstructure and nanomechanical properties of Fe^+ implanted silicon
Microstructure and nanomechanical properties of Fe^+ implanted silicon
Nunes, B. (author) / Magalhaes, S. (author) / Franco, N. (author) / Alves, E. (author) / Colaco, R. (author)
APPLIED SURFACE SCIENCE ; 284 ; 533-539
2013-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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