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Nonlinearity Analysis of Closed-Loop Sigma Delta Micro-Mechanical Accelerometer

Liu, X.W. / Xu, H.L. / Lv, B.J. / Zhou, J.J. / Chen, S. / Yang, J.

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Nonlinearity Analysis of Closed-Loop Sigma Delta Micro-Mechanical Accelerometer

Liu, X.W. / Xu, H.L. / Lv, B.J. / Zhou, J.J. / Chen, S. / Yang, J.

Nonlinearity Analysis of Closed-Loop Sigma Delta Micro-Mechanical Accelerometer

Liu, X.W. / Xu, H.L. / Lv, B.J. / Zhou, J.J. / Chen, S. / Yang, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Nonlinearity Analysis of Closed-Loop Sigma Delta Micro-Mechanical Accelerometer

Contributors:

Liu, X.W. (author) / Xu, H.L. (author) / Lv, B.J. (author) / Zhou, J.J. (author) / Chen, S. (author) / Yang, J. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 380-386

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

7 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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