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    Ultrasonic Energy Characteristics of ZnO Piezoelectric Thin Films Array Based on MEMS

    New search for: Wu, S.H.
    New search for: Gao, Z.H.
    New search for: Zhao, Z.
    New search for: Xiao, L.
    New search for: Xuan, Y.D.
    New search for: Tang, F.

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    Ultrasonic Energy Characteristics of ZnO Piezoelectric Thin Films Array Based on MEMS

    New search for: Wu, S.H.
    New search for: Gao, Z.H.
    New search for: Zhao, Z.
    New search for: Xiao, L.
    New search for: Xuan, Y.D.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ultrasonic Energy Characteristics of ZnO Piezoelectric Thin Films Array Based on MEMS

    New search for: Wu, S.H.
    New search for: Gao, Z.H.
    New search for: Zhao, Z.
    New search for: Xiao, L.
    New search for: Xuan, Y.D.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Ultrasonic Energy Characteristics of ZnO Piezoelectric Thin Films Array Based on MEMS

    Contributors:

    Wu, S.H. (author) / Gao, Z.H. (author) / Zhao, Z. (author) / Xiao, L. (author) / Xuan, Y.D. (author) / Tang, F.

    Published in:

    Micro-Nano Technology XIV ; 1263-1266

    KEY ENGINEERING MATERIALS ; 562/565

    Publication date:

    2013-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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