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    Measurement of piezoelectric strength of ZnO thin films for MEMS applications

    New search for: Von Preissig, F. J.
    New search for: Zeng, H.
    New search for: Eun Sok Kim
    New search for: Lee, S.-W. R.

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    Measurement of piezoelectric strength of ZnO thin films for MEMS applications

    New search for: Von Preissig, F. J.
    New search for: Zeng, H.
    New search for: Eun Sok Kim
    New search for: Lee, S.-W. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Measurement of piezoelectric strength of ZnO thin films for MEMS applications

    New search for: Von Preissig, F. J.
    New search for: Zeng, H.
    New search for: Eun Sok Kim
    New search for: Lee, S.-W. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Measurement of piezoelectric strength of ZnO thin films for MEMS applications

    Contributors:

    Von Preissig, F. J. (author) / Zeng, H. (author) / Eun Sok Kim (author) / Lee, S.-W. R.

    Published in:

    Piezoelectric motors/actuators and their applications ; 396-403

    SMART MATERIALS AND STRUCTURES ; 7

    Publication date:

    1998-01-01

    Size:

    8 pages

    ISSN:

    0964-1726

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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