Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition: Fid-Bau Portal

Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition

Turri, R. G. / Santos, R. M. / Rangel, E. C. / da Cruz, N. C. / Bortoleto, J. R. R. / Dias da Silva, J. H. / Antonio, C. A. / Durrant, S. F.

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Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition

Turri, R. G. / Santos, R. M. / Rangel, E. C. / da Cruz, N. C. / Bortoleto, J. R. R. / Dias da Silva, J. H. / Antonio, C. A. / Durrant, S. F.

Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition

Turri, R. G. / Santos, R. M. / Rangel, E. C. / da Cruz, N. C. / Bortoleto, J. R. R. / Dias da Silva, J. H. / Antonio, C. A. / Durrant, S. F.

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Document information

Title:

Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition

Contributors:

Turri, R. G. (author) / Santos, R. M. (author) / Rangel, E. C. (author) / da Cruz, N. C. (author) / Bortoleto, J. R. R. (author) / Dias da Silva, J. H. (author) / Antonio, C. A. (author) / Durrant, S. F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 282 ; 474-481

Publication date:

2013-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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