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Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition
Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition
Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition
Turri, R. G. (Autor:in) / Santos, R. M. (Autor:in) / Rangel, E. C. (Autor:in) / da Cruz, N. C. (Autor:in) / Bortoleto, J. R. R. (Autor:in) / Dias da Silva, J. H. (Autor:in) / Antonio, C. A. (Autor:in) / Durrant, S. F. (Autor:in)
APPLIED SURFACE SCIENCE ; 282 ; 474-481
01.01.2013
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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