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    Patterning of hafnia and titania via gas-phase soft lithography combined with atomic layer deposition

    New search for: Notley, S. M.
    New search for: Fogden, A.

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    Patterning of hafnia and titania via gas-phase soft lithography combined with atomic layer deposition

    New search for: Notley, S. M.
    New search for: Fogden, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Patterning of hafnia and titania via gas-phase soft lithography combined with atomic layer deposition

    New search for: Notley, S. M.
    New search for: Fogden, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Patterning of hafnia and titania via gas-phase soft lithography combined with atomic layer deposition

    Contributors:

    Notley, S. M. (author) / Fogden, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 285 ; 220-225

    Publication date:

    2013-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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