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Metal layer mask patterning by force microscopy lithography

Filho, H. D. / Mauricio, M. H. / Ponciano, C. R. / Prioli, R.

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Metal layer mask patterning by force microscopy lithography

Filho, H. D. / Mauricio, M. H. / Ponciano, C. R. / Prioli, R.

Metal layer mask patterning by force microscopy lithography

Filho, H. D. / Mauricio, M. H. / Ponciano, C. R. / Prioli, R.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Metal layer mask patterning by force microscopy lithography

Contributors:

Filho, H. D. (author) / Mauricio, M. H. (author) / Ponciano, C. R. (author) / Prioli, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 112 ; 194-199

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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