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    Functions of Trilon^(R) P as a polyamine in copper chemical mechanical polishing

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    New search for: Lan, Y.
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    Functions of Trilon^(R) P as a polyamine in copper chemical mechanical polishing

    New search for: Jiang, L.
    New search for: Lan, Y.
    New search for: He, Y.
    New search for: Li, Y.
    New search for: Luo, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Functions of Trilon^(R) P as a polyamine in copper chemical mechanical polishing

    New search for: Jiang, L.
    New search for: Lan, Y.
    New search for: He, Y.
    New search for: Li, Y.
    New search for: Luo, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Functions of Trilon^(R) P as a polyamine in copper chemical mechanical polishing

    Contributors:

    Jiang, L. (author) / Lan, Y. (author) / He, Y. (author) / Li, Y. (author) / Luo, J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 288 ; 265-274

    Publication date:

    2014-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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