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New method for boron removal from silicon by electron beam injection

Tan, Y. / Qin, S. / Wen, S. / Li, J. / Shi, S. / Jiang, D. / Pang, D.

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New method for boron removal from silicon by electron beam injection

Tan, Y. / Qin, S. / Wen, S. / Li, J. / Shi, S. / Jiang, D. / Pang, D.

New method for boron removal from silicon by electron beam injection

Tan, Y. / Qin, S. / Wen, S. / Li, J. / Shi, S. / Jiang, D. / Pang, D.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

New method for boron removal from silicon by electron beam injection

Contributors:

Tan, Y. (author) / Qin, S. (author) / Wen, S. (author) / Li, J. (author) / Shi, S. (author) / Jiang, D. (author) / Pang, D. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 18 ; 42-45

Publication date:

2014-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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