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Annealing and Deposition Parameters Influence on the Performance of AlN Thin Films
Annealing and Deposition Parameters Influence on the Performance of AlN Thin Films
Annealing and Deposition Parameters Influence on the Performance of AlN Thin Films
Gui, T.L. (author) / Jiang, S.D. (author) / Liu, S. / Yuan, X.
2014-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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