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Annealing and Deposition Parameters Influence on the Performance of AlN Thin Films
Annealing and Deposition Parameters Influence on the Performance of AlN Thin Films
Annealing and Deposition Parameters Influence on the Performance of AlN Thin Films
Gui, T.L. (Autor:in) / Jiang, S.D. (Autor:in) / Liu, S. / Yuan, X.
Recent Highlights in Advanced Materials ; 441-445
KEY ENGINEERING MATERIALS ; 575/576
01.01.2014
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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