Micro-structural evaluation of Ti/Al/Ni/Au ohmic contacts with different Ti/Al thicknesses in AlGaN/GaN HEMTs: Fid-Bau Portal

Micro-structural evaluation of Ti/Al/Ni/Au ohmic contacts with different Ti/Al thicknesses in AlGaN/GaN HEMTs

Mahajan, S. S. / Dhaul, A. / Laishram, R. / Kapoor, S. / Vinayak, S. / Sehgal, B. K.

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Micro-structural evaluation of Ti/Al/Ni/Au ohmic contacts with different Ti/Al thicknesses in AlGaN/GaN HEMTs

Mahajan, S. S. / Dhaul, A. / Laishram, R. / Kapoor, S. / Vinayak, S. / Sehgal, B. K.

Micro-structural evaluation of Ti/Al/Ni/Au ohmic contacts with different Ti/Al thicknesses in AlGaN/GaN HEMTs

Mahajan, S. S. / Dhaul, A. / Laishram, R. / Kapoor, S. / Vinayak, S. / Sehgal, B. K.

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Document information

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Document information

Title:

Micro-structural evaluation of Ti/Al/Ni/Au ohmic contacts with different Ti/Al thicknesses in AlGaN/GaN HEMTs

Contributors:

Mahajan, S. S. (author) / Dhaul, A. (author) / Laishram, R. (author) / Kapoor, S. (author) / Vinayak, S. (author) / Sehgal, B. K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 183 ; 47-53

Publication date:

2014-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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