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Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate

Hong, L. / Rusli / Wang, X. C. / Zheng, H. Y. / Wang, H. / Yu, H. Y.

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Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate

Hong, L. / Rusli / Wang, X. C. / Zheng, H. Y. / Wang, H. / Yu, H. Y.

Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate

Hong, L. / Rusli / Wang, X. C. / Zheng, H. Y. / Wang, H. / Yu, H. Y.

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Access via TIB

Check availability in my library

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Document information

Title:

Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate

Contributors:

Hong, L. (author) / Rusli (author) / Wang, X. C. (author) / Zheng, H. Y. (author) / Wang, H. (author) / Yu, H. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 297 ; 134-138

Publication date:

2014-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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