Comparative study of the carbon nanofilm and nanodots grown by plasma-enhanced hot filament chemical vapor deposition: Fid-Bau Portal

Comparative study of the carbon nanofilm and nanodots grown by plasma-enhanced hot filament chemical vapor deposition

Wang, B. B. / Chen, C. C. / Zheng, K. / Cheng, Q. J. / Wang, L. / Wang, R. Z.

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Comparative study of the carbon nanofilm and nanodots grown by plasma-enhanced hot filament chemical vapor deposition

Wang, B. B. / Chen, C. C. / Zheng, K. / Cheng, Q. J. / Wang, L. / Wang, R. Z.

Comparative study of the carbon nanofilm and nanodots grown by plasma-enhanced hot filament chemical vapor deposition

Wang, B. B. / Chen, C. C. / Zheng, K. / Cheng, Q. J. / Wang, L. / Wang, R. Z.

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Check availability in my library

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Document information

Title:

Comparative study of the carbon nanofilm and nanodots grown by plasma-enhanced hot filament chemical vapor deposition

Contributors:

Wang, B. B. (author) / Chen, C. C. (author) / Zheng, K. (author) / Cheng, Q. J. (author) / Wang, L. (author) / Wang, R. Z. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 21 ; 146-153

Publication date:

2014-01-01

Size:

8 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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