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Fabrication of Si Nanowire Biosensor Using FIB and its Evaluations

Truong, A.H. / Sone, H. / Hosaka, S.

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Fabrication of Si Nanowire Biosensor Using FIB and its Evaluations

Truong, A.H. / Sone, H. / Hosaka, S.

Fabrication of Si Nanowire Biosensor Using FIB and its Evaluations

Truong, A.H. / Sone, H. / Hosaka, S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of Si Nanowire Biosensor Using FIB and its Evaluations

Contributors:

Truong, A.H. (author) / Sone, H. (author) / Hosaka, S. (author) / Hosaka, S.

Published in:

Advanced Micro-Device Engineering IV ; 224-228

KEY ENGINEERING MATERIALS ; 596

Publication date:

2014-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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