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Characterization of Ta-Si-N coatings prepared using direct current magnetron co-sputtering

Chen, Y. I. / Lin, K. Y. / Wang, H. H. / Cheng, Y. R.

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Characterization of Ta-Si-N coatings prepared using direct current magnetron co-sputtering

Chen, Y. I. / Lin, K. Y. / Wang, H. H. / Cheng, Y. R.

Characterization of Ta-Si-N coatings prepared using direct current magnetron co-sputtering

Chen, Y. I. / Lin, K. Y. / Wang, H. H. / Cheng, Y. R.

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Check availability in my library

Order at Subito €

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Document information

Title:

Characterization of Ta-Si-N coatings prepared using direct current magnetron co-sputtering

Contributors:

Chen, Y. I. (author) / Lin, K. Y. (author) / Wang, H. H. (author) / Cheng, Y. R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 305 ; 805-816

Publication date:

2014-01-01

Size:

12 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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