Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film: Fid-Bau Portal

Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film

Her, S. C. / Wu, C. L.

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Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film

Her, S. C. / Wu, C. L.

Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film

Her, S. C. / Wu, C. L.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film

Contributors:

Her, S. C. (author) / Wu, C. L. (author)

Published in:

STRENGTH OF MATERIALS C/C OF PROBLEMY PROCHNOSTI ; 46 ; 208-213

Publication date:

2014-01-01

Size:

6 pages

ISSN:

0039-2316

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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