Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti-Si-C thin film: Fid-Bau Portal

Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti-Si-C thin film

Chen, Z.S. / Li, H.J. / Fu, Q.G. / Yang, D. / Shen, Q.L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti-Si-C thin film

Chen, Z.S. / Li, H.J. / Fu, Q.G. / Yang, D. / Shen, Q.L.

Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti-Si-C thin film

Chen, Z.S. / Li, H.J. / Fu, Q.G. / Yang, D. / Shen, Q.L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti-Si-C thin film

Contributors:

Chen, Z.S. (author) / Li, H.J. (author) / Fu, Q.G. (author) / Yang, D. (author) / Shen, Q.L. (author)

Published in:

MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 29 ; 975-979

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0267-0836

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Y. Mao / J. Engels / A. Houben et al. | DOAJ | 2017

Free access

Effect of annealing on CoSi2 thin films prepared by magnetron sputtering

Cheng, F. / Jiang, C. / Wu, J. | British Library Online Contents | 2005

Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Macías, H.A. / Yate, L. / Coy, L.E. et al. | British Library Online Contents | 2018

Effect of Annealing on Formation and Microstructure of ZnTiO~3 Thin Films by DC Reactive Magnetron Co-Sputtering

Huang, Y.L. / Lee, Y.C. / Tsai, D.C. et al. | British Library Online Contents | 2011

Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Huang, F. / Song, Q. / Li, M. et al. | British Library Online Contents | 2008