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CMOS Biosensor using TSV Interposer Technology

Ebefors, T. / Fredlund, J. / Jung, E. / Braun, T.

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CMOS Biosensor using TSV Interposer Technology

Ebefors, T. / Fredlund, J. / Jung, E. / Braun, T.

CMOS Biosensor using TSV Interposer Technology

Ebefors, T. / Fredlund, J. / Jung, E. / Braun, T.

Access

Access via TIB

Check availability in my library

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Document information

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Document information

Title:

CMOS Biosensor using TSV Interposer Technology

Contributors:

Ebefors, T. (author) / Fredlund, J. (author) / Jung, E. (author) / Braun, T. (author)

Published in:

ADVANCING MICROELECTRONICS ; 41 ; 14-21

Publication date:

2014-01-01

Size:

8 pages

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.381

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