Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM: Fid-Bau Portal

Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

Hofsass, H. / Zhang, K. / Mutzke, A.

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Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

Hofsass, H. / Zhang, K. / Mutzke, A.

Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

Hofsass, H. / Zhang, K. / Mutzke, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

Contributors:

Hofsass, H. (author) / Zhang, K. (author) / Mutzke, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 310 ; 134-141

Publication date:

2014-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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