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    Effect of flash lamp annealing on electrical activation in boron-implanted polycrystalline Si thin films

    New search for: Do, W.
    New search for: Jin, W. B.
    New search for: Choi, J.
    New search for: Bae, S. M.
    New search for: Kim, H. J.
    New search for: Kim, B. K.
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    New search for: Greenblatt, M.
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    Effect of flash lamp annealing on electrical activation in boron-implanted polycrystalline Si thin films

    New search for: Do, W.
    New search for: Jin, W. B.
    New search for: Choi, J.
    New search for: Bae, S. M.
    New search for: Kim, H. J.
    New search for: Kim, B. K.
    New search for: Park, S.
    New search for: Hwang, J. H.
    New search for: Boo, J.-H.
    New search for: Greenblatt, M.
    New search for: Nam, T.-h.
    New search for: Song, C. S.
    New search for: Xue, D.
    New search for: Yin, S.
    New search for: Ahn, H.
    New search for: Kim, J. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of flash lamp annealing on electrical activation in boron-implanted polycrystalline Si thin films

    New search for: Do, W.
    New search for: Jin, W. B.
    New search for: Choi, J.
    New search for: Bae, S. M.
    New search for: Kim, H. J.
    New search for: Kim, B. K.
    New search for: Park, S.
    New search for: Hwang, J. H.
    New search for: Boo, J.-H.
    New search for: Greenblatt, M.
    New search for: Nam, T.-h.
    New search for: Song, C. S.
    New search for: Xue, D.
    New search for: Yin, S.
    New search for: Ahn, H.
    New search for: Kim, J. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Effect of flash lamp annealing on electrical activation in boron-implanted polycrystalline Si thin films

    Contributors:

    Do, W. (author) / Jin, W. B. (author) / Choi, J. (author) / Bae, S. M. (author) / Kim, H. J. (author) / Kim, B. K. (author) / Park, S. (author) / Hwang, J. H. (author) / Boo, J.-H. / Greenblatt, M.

    Published in:

    Proceedings of the IFFM2013 - Vol. 1: Fundamentals of the functional materials and Vol. 2: Applications of the functional materials ; 164-168

    MATERIALS RESEARCH BULLETIN ; 58

    Publication date:

    2014-01-01

    Size:

    5 pages

    ISSN:

    0025-5408

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11 / 620

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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