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Reproducibility of a Nanometre Accurate Moving-Scale Measurement System
Reproducibility of a Nanometre Accurate Moving-Scale Measurement System
Reproducibility of a Nanometre Accurate Moving-Scale Measurement System
Bosmans, N. (author) / Qian, J. (author) / Reynaerts, D. (author) / Schmitt, R. / Bosse, H.
2014-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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