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Automatically aligned electron beam lithography on the nanometre scale

Rosolen, G.C.

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Automatically aligned electron beam lithography on the nanometre scale

Rosolen, G.C.

Automatically aligned electron beam lithography on the nanometre scale

Rosolen, G.C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Automatically aligned electron beam lithography on the nanometre scale

Contributors:

Rosolen, G.C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 144 ; 467-471

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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