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    Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement System

    New search for: Liu, Y.M.
    New search for: Yuan, M.Q.
    New search for: Cao, J.R.
    New search for: Ma, J.
    New search for: Tan, J.B.
    New search for: Schmitt, R.
    New search for: Bosse, H.

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    Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement System

    New search for: Liu, Y.M.
    New search for: Yuan, M.Q.
    New search for: Cao, J.R.
    New search for: Ma, J.
    New search for: Tan, J.B.
    New search for: Schmitt, R.
    New search for: Bosse, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement System

    New search for: Liu, Y.M.
    New search for: Yuan, M.Q.
    New search for: Cao, J.R.
    New search for: Ma, J.
    New search for: Tan, J.B.
    New search for: Schmitt, R.
    New search for: Bosse, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement System

    Contributors:

    Liu, Y.M. (author) / Yuan, M.Q. (author) / Cao, J.R. (author) / Ma, J. (author) / Tan, J.B. (author) / Schmitt, R. / Bosse, H.

    Published in:

    Measurement Technology and Intelligent Instruments XI Metrology - Master Global Challenges ; 43-50

    KEY ENGINEERING MATERIALS ; 613

    Publication date:

    2014-01-01

    Size:

    8 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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